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【英文标准名称】:StandardPracticeforAnalyticallyDescribingSputter-Depth-ProfileInterfaceDatabyanExtendedLogisticFunction
【原文标准名称】:用扩展的逻辑函数分析描述溅射深度剖面接口数据的标准规程
【标准号】:ASTME1636-2004
【标准状态】:现行
【国别】:
【发布日期】:2004
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E42.08
【标准类型】:(Practice)
【标准水平】:()
【中文主题词】:分析;实施规程;深度;质谱学
【英文主题词】:logisticfunction;sputter-depth-profileinterfacedata
【摘要】:Informationoninterfacecompositionisfrequentlyobtainedbymeasuringsurfacecompositionwhilethespecimenmaterialisgraduallyremovedbyionbombardment(seeGuideE1127andPracticeE1162).Inthisway,interfacesarerevealedandcharacterizedbythemeasurementofcompositionversusdepthtoobtainasputter-depthprofile.Theshapeofsuchinterfaceprofilescontainsinformationaboutthephysicalandchemicalpropertiesoftheinterfaceregion.Inordertoaccuratelyandunambiguouslydescribethisinterfaceregionandtodetermineitswidth(seeGuideE1438),itisnecessarytodefinetheshapeoftheentireinterfaceprofilewithasingleanalyticfunction.Althoughnogeneralphysicalmodelcurrentlyexistsfordescribingtheshapeofinterfacesputter-depthprofiles,interfaceprofilesdohaveasigmoidalshapecharacteristicofthecumulativelogisticdistribution.Useofsuchalogisticfunctionisphysicallyplausibleandissuperiortootherfunctions(forexample,polynomials)thathaveheretoforebeenusedforinterfaceprofileanalysisinthatitcontainstheminimumnumberofparametersfordescribinginterfaceshapes.Manyattemptshavebeenmadetocharacterizeinterfaceprofileswithgeneralfunctions(suchaspolynomialsorerrorfunctions)butthesehavesufferedfrominstabilitiesandaninabilitytohandlepoorlystructureddata.Choiceofthelogisticfunctionalongwithaspecificallywrittenleast-squaresprocedure(describedinAppendixX1)canprovidestatisticallyevaluatedparametersthatdescribethewidth,asymmetry,anddepthofinterfaceprofilesinareproducibleandunambiguousway.1.1Thispracticecoversasystematicmethodforanalyzingsputter-depth-profileinterfacedataandforaccuratelycharacterizingtheshapeoftheinterfaceregion.Interfaceprofiledataaredescribedwithanappropriateanalyticfunction;theparametersofthisfunctiondefinetheinterfacewidth,itsasymmetry,anditsdepthfromtheoriginalsurface.Theuseofthispracticeisrecommendedinorderthattheshapesofcompositionprofilesofinterfacesacquiredwithdifferentinstrumentsandtechniquesondifferentmaterialscanbeunambiguouslycomparedandinterpreted.1.2Thispracticeisintendedtobeusedtodescribetheshapeofdepthprofiledataobtainedataninterfacebetweentwodissimilarmaterialsforthatcaseinwhichthemeasuredconcentrationoftheoutermaterialgoesfrom100to0%andtheinnermaterialgoesfrom0to100%.1.3Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:A42
【国际标准分类号】:71_040_50
【页数】:7P.;A4
【正文语种】: